ISO 14644

ISO 14644-1 covers the classification of air cleanliness in clean rooms and associated controlled environments. Classification in accordance with this standard is specified and accomplished exclusively in terms of concentration of airborne particles. Furthermore, the only particle populations considered for classification purposes are those that have cumulative distributions based on threshold (lower limit) sizes ranging from 0.1 µm to 5 µm.

CLASS Number of Particles per Cubic Meter by Micrometer Size

  0.1 um 0.2 um 0.3 um 0.5 um 1 um 5 um
ISO 1 10 2        
ISO 2 100 24 10 4    
ISO 3 1000 237 102 35 8  
ISO 4 10000 2370 1020 352 83  
ISO 5 100000 23700 10200 3520 832 29
ISO 6 1000000 237000 102000 35200 8320 293
ISO 7       352000 83200 2930
ISO 8       3520000 832000 29300
ISO 9       35200000 8320000 2
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